Invention Grant
- Patent Title: Micromechanical micromirror array and corresponding operating method
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Application No.: US16652210Application Date: 2018-10-18
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Publication No.: US11307404B2Publication Date: 2022-04-19
- Inventor: Helmut Grutzeck , Timo Schary , Joerg Muchow , Philip Kaupmann
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102017218670.4 20171019
- International Application: PCT/EP2018/078609 WO 20181018
- International Announcement: WO2019/077063 WO 20190425
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00 ; G02B26/10 ; H01L41/09

Abstract:
A micromechanical micromirror array including a frame including a cutout, a micromirror device suspended on the frame in the area of the cutout in a first plane, a first pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a first spring device, a second pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a second spring device, a first drive device for deflecting the first pivoting vane device along a first axis, perpendicular to the first plane, and a second drive device for the antiphase deflection of the second pivoting vane device along the first axis.
Public/Granted literature
- US20200249467A1 MICROMECHANICAL MICROMIRROR ARRAY AND CORRESPONDING OPERATING METHOD Public/Granted day:2020-08-06
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