Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16829509Application Date: 2020-03-25
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Publication No.: US11307479B2Publication Date: 2022-04-19
- Inventor: Teruhiro Kuwajima , Yasutaka Nakashiba
- Applicant: RENESAS ELECTRONICS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Main IPC: G02F1/025
- IPC: G02F1/025 ; G02F1/225 ; G02F1/01 ; G02F1/21

Abstract:
A semiconductor device includes a first insulating layer, an optical modulator, and a multilayer wiring layer. The optical modulator is formed on the first insulating layer. The multilayer wiring layer is formed on the first insulating layer and including a wiring and a resistive element which are spaced apart from each other. The resistive element is formed without overlapping with the optical modulator in plan view. A material of the resistive element is at least one selected from the group consisting of titanium, titanium nitride, tantalum, tantalum nitride, tungsten, and silicon chromium.
Public/Granted literature
- US20210302801A1 SEMICONDUCTOR DEVICE Public/Granted day:2021-09-30
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