Invention Grant
- Patent Title: Mask, mask assembly, exposure machine, method for testing shadowing effect on window, and photolithography method
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Application No.: US16069769Application Date: 2017-12-08
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Publication No.: US11307491B2Publication Date: 2022-04-19
- Inventor: Jiabin Cui , Li Wang , Zhibin Li , Pengfei Liang , Chang Liu , Peng Chen
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Applicant Address: CN Beijing; CN Inner Mongolia
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee Address: CN Beijing; CN Inner Mongolia
- Priority: CN201710326143.5 20170510
- International Application: PCT/CN2017/115267 WO 20171208
- International Announcement: WO2018/205588 WO 20181115
- Main IPC: G03F1/44
- IPC: G03F1/44 ; G03F7/20

Abstract:
A mask, a mask assembly, an exposure machine, a method for testing shadowing effect on a window, and a photolithography method are provided. The mask includes a light transmission area; a functional window provided at a side of the light transmission area; and at least one of a first detection mark and a second detection mark; wherein the first detection mark is flushed with a border of the functional window adjacent to an interior of the mask; and the second detection mark is disposed between the profile of the light transmission area and the functional window.
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