Invention Grant
- Patent Title: Cascade defect inspection
-
Application No.: US16479203Application Date: 2018-01-18
-
Publication No.: US11308602B2Publication Date: 2022-04-19
- Inventor: Zhichao Chen , Wei Fang
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL AH Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL AH Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- International Application: PCT/EP2018/051164 WO 20180118
- International Announcement: WO2018/134287 WO 20180726
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N21/95

Abstract:
A defect inspection system is disclosed. According to certain embodiments, the system includes a memory storing instructions implemented as a plurality of modules. Each of the plurality of modules is configured to detect defects having a different property. The system also includes a controller configured to cause the computer system to: receive inspection data representing an image of a wafer; input the inspection data to a first module of the plurality of modules, the first module outputs a first set of points of interests (POIs) having a first property; input the first set of POIs to a second module of the plurality of modules, the second module output a second set of POIs having the second property; and report that the second set of POIs as defects having both the first property and the second property.
Information query