Invention Grant
- Patent Title: Substrate storage container
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Application No.: US16488528Application Date: 2017-02-27
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Publication No.: US11309200B2Publication Date: 2022-04-19
- Inventor: Satoko Kai
- Applicant: Miraial Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Miraial Co., Ltd.
- Current Assignee: Miraial Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- International Application: PCT/JP2017/007473 WO 20170227
- International Announcement: WO2018/154779 WO 20180830
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
A back side substrate support portion 6 includes a lower side inclined face 622 on which an end of a back face of a substrate W slides, and a substrate support portion 632 that is located above the lower side inclined face 622 and can support an edge portion of the substrate W. When a container main body opening portion 21 is closed by a lid body 3, the edge portion of the substrate W slides on the lower side inclined face 622 and reaches the substrate support portion 632. At least a portion of the lower side inclined face 622 is configured from a second member that is different from a first member that configures the substrate support portion 632, and the second member has a lower maximum static friction coefficient and lower wear resistance than the first member.
Public/Granted literature
- US20200043755A1 SUBSTRATE STORAGE CONTAINER Public/Granted day:2020-02-06
Information query
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