Invention Grant
- Patent Title: Methods of forming microelectronic devices, and related microelectronic devices, memory devices, and electronic systems
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Application No.: US16667719Application Date: 2019-10-29
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Publication No.: US11309328B2Publication Date: 2022-04-19
- Inventor: Shuangqiang Luo , Indra V. Chary , Justin B. Dorhout
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/11582 ; H01L27/11519 ; H01L27/11524 ; G11C16/08 ; H01L27/11565 ; H01L27/1157 ; H01L27/11556

Abstract:
A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a stack structure comprising insulative structures and additional insulative structures vertically alternating with the insulative structures, a dielectric structure vertically extending partially through the stack structure, and a dielectric material vertically overlying and horizontally extending across the stack structure and the dielectric structure. Portions of at least the dielectric material and the dielectric structure are removed to form a trench vertically overlying and at least partially horizontally overlapping a remaining portion of the dielectric structure. The trench is substantially filled with additional dielectric material. Microelectronic devices, memory devices, and electronic systems are also described.
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