Invention Grant
- Patent Title: Three-dimensional NOR-type memory device and method of making the same
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Application No.: US16778804Application Date: 2020-01-31
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Publication No.: US11309329B2Publication Date: 2022-04-19
- Inventor: Hanan Borukhov
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/08 ; H01L29/792 ; H01L21/768 ; H01L29/10 ; H01L21/28 ; H01L21/311 ; H01L29/51 ; H01L21/02 ; H01L29/36

Abstract:
A NOR-type three-dimensional memory device includes a vertically alternating stack of insulating layers and electrically conductive layers located over a substrate, and laterally alternating sequences of respective active region pillars and respective memory stack structures. Each laterally alternating sequence is electrically isolated from the electrically conductive layers by a respective blocking dielectric layer at each level of the electrically conductive layers. Each memory stack structures include a memory film and a semiconductor channel material portion that vertically extend through the vertically alternating stack. The active region pillars include an alternating sequence of source pillar and drain pillars.
Public/Granted literature
- US20200168630A1 THREE-DIMENSIONAL NOR-TYPE MEMORY DEVICE AND METHOD OF MAKING THE SAME Public/Granted day:2020-05-28
Information query
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