- Patent Title: Three-dimensional memory device containing ferroelectric memory elements encapsulated by transition metal-containing conductive elements and method of making thereof
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Application No.: US16568668Application Date: 2019-09-12
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Publication No.: US11309332B2Publication Date: 2022-04-19
- Inventor: Adarsh Rajashekhar , Raghuveer S. Makala , Rahul Sharangpani , Seung-Yeul Yang , Fei Zhou
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L27/11597 ; H01L27/1159 ; H01L27/11587

Abstract:
A three-dimensional ferroelectric memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, where each of the electrically conductive layers contains a transition metal element-containing conductive liner and a conductive fill material portion, a vertical semiconductor channel extending vertically through the alternating stack, a vertical stack of tubular transition metal element-containing conductive spacers laterally surrounding the vertical semiconductor channel and located at levels of the electrically conductive layers, and a ferroelectric material layer located between the vertical stack of tubular transition metal element-containing conductive spacers and the transition metal element-containing conductive liner.
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