Invention Grant
- Patent Title: Spacer-defined back-end transistor as memory selector
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Application No.: US17078583Application Date: 2020-10-23
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Publication No.: US11309353B2Publication Date: 2022-04-19
- Inventor: Ken-Ichi Goto , Chung-Te Lin , Mauricio Manfrini
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L27/22

Abstract:
The present disclosure, in some embodiments, relates to a memory device. In some embodiments, the memory device comprises a substrate and an interconnect structure disposed over the substrate. The interconnect structure comprises stacked interconnect metal layers disposed within stacked interlayer dielectric (ILD) layers. A memory cell is disposed between an upper interconnect metal layer and an intermediate interconnect metal layer. A selecting transistor is connected to the memory cell and disposed between the intermediate interconnect metal layer and a lower interconnect metal layer. By placing the selecting transistor within the back-end interconnect structure between two interconnect metal layers, front-end space is saved, and more integration flexibility is provided.
Public/Granted literature
- US20210343787A1 SPACER-DEFINED BACK-END TRANSISTOR AS MEMORY SELECTOR Public/Granted day:2021-11-04
Information query
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