Invention Grant
- Patent Title: Three-dimensional nonvolatile memory device having resistance change structure and method of operating the same
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Application No.: US16908635Application Date: 2020-06-22
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Publication No.: US11309354B2Publication Date: 2022-04-19
- Inventor: Jae Hyun Han , Se Ho Lee , Hyangkeun Yoo
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2019-0178753 20191230
- Main IPC: H01L27/24
- IPC: H01L27/24 ; G11C13/00 ; H01L45/00 ; G11C5/06

Abstract:
A nonvolatile memory device includes a substrate having an upper surface and a channel structure disposed over the substrate. The channel structure includes at least one channel layer pattern and at least one interlayer insulation layer pattern, which are alternately stacked in a first direction perpendicular to the upper surface, and the channel structure extends in a second direction perpendicular to the first direction. The nonvolatile memory device includes a resistance change layer disposed over the substrate and on at least a portion of one sidewall surface of the channel structure, a gate insulation layer disposed over the substrate and on the resistance change layer, and a plurality of gate line structures disposed over the substrate, each contacting a first surface of the gate insulation layer and disposed to be spaced apart from each other in the second direction.
Public/Granted literature
Information query
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