Invention Grant
- Patent Title: System and method for sub micron additive manufacturing
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Application No.: US15857917Application Date: 2017-12-29
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Publication No.: US11312067B2Publication Date: 2022-04-26
- Inventor: Sourabh Kumar Saha , Robert Matthew Panas , Shih-Chi Chen
- Applicant: Lawrence Livermore National Security, LLC
- Applicant Address: US CA Livermore
- Assignee: Lawrence Livermore National Security, LLC
- Current Assignee: Lawrence Livermore National Security, LLC
- Current Assignee Address: US CA Livermore
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G02B27/28
- IPC: G02B27/28 ; B33Y10/00 ; B29C64/135 ; B29C64/286 ; B29C64/273 ; G02B26/08 ; G03F7/20 ; B33Y30/00

Abstract:
An apparatus is disclosed for performing an additive manufacturing operation to form a structure by processing a photopolymer resist material. The apparatus may incorporate a laser for generating a laser beam, and a tunable mask for receiving the laser beam which has an optically dispersive element. The mask splits the laser beam into a plurality of emergent beams each having a subplurality of beamlets of varying or identical intensity, with each beamlet emerging from a unique subsection of illuminated regions of the mask. A collimator collimates at least one of the emergent beams to form a collimated beam. One or more focusing elements focuses the collimated beam into a focused beam which is projected as a focused image plane on or within the resist material. The focused beam simultaneously illuminates a layer of the resist material to process an entire layer in a parallel fashion.
Public/Granted literature
- US20190126537A1 SYSTEM AND METHOD FOR SUBMICRON ADDITIVE MANUFACTURING Public/Granted day:2019-05-02
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