Invention Grant
- Patent Title: Microdevice comprising at least two movable elements
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Application No.: US16492345Application Date: 2018-03-14
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Publication No.: US11312618B2Publication Date: 2022-04-26
- Inventor: Audrey Berthelot , Mikaël Colin , Alain Jeanroy , Guillaume Lehee , Olivier Vancauwenberghe , Philippe Onfroy , Jean-Sébastien Mace
- Applicant: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: FR1752155 20170316
- International Application: PCT/FR2018/050597 WO 20180314
- International Announcement: WO2018/172661 WO 20180927
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B5/00
Abstract:
A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.
Public/Granted literature
- US20210130158A1 MICRODEVICE COMPRISING AT LEAST TWO MOVABLE ELEMENTS Public/Granted day:2021-05-06
Information query
