Invention Grant
- Patent Title: Linear source apparatus, system and method of use
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Application No.: US17022868Application Date: 2020-09-16
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Publication No.: US11313033B2Publication Date: 2022-04-26
- Inventor: Tariq Ali , Ilyas I. Khayrullin , Amalkumar P. Ghosh , Evan P. Donoghue , Qi Wang , Fridrich Vazan , Kerry Tice , Laurie Sziklas
- Applicant: eMagin Corporation
- Applicant Address: US NY Hopewell Junction
- Assignee: eMagin Corporation
- Current Assignee: eMagin Corporation
- Current Assignee Address: US NY Hopewell Junction
- Agency: Kaplan Breyer Schwarz, LLP
- Main IPC: C23C14/28
- IPC: C23C14/28 ; C23C14/24

Abstract:
A linear evaporation apparatus, system and method including a conductance chamber including a linear output section configured to emit a linear source deposition flux therethrough, an evaporative vapor communication conduit including an evaporative vapor mixing chamber and a plurality of crucible-receiving apertures at distal ends from the evaporative vapor mixing chamber, wherein the evaporative vapor mixing chamber is in communication with the conductance chamber and configured to transmit the linear source deposition flux therethrough, and a plurality of crucibles, each of the plurality of crucibles corresponding to one of the plurality of crucible-receiving apertures at the distal ends from the evaporative vapor mixing chamber, each of the plurality of crucibles configured to hold a material and heat the material to a corresponding material evaporation temperature, each of the plurality of crucibles further including a vapor pressure activated lid configured to open at a predetermined material vapor pressure value generated by heating the crucibles to at least the corresponding material evaporation temperature.
Information query
IPC分类: