Invention Grant
- Patent Title: Spring-loaded fastening system for process chamber liners
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Application No.: US16661679Application Date: 2019-10-23
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Publication No.: US11313404B2Publication Date: 2022-04-26
- Inventor: Benjamin F. Webb
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED Materials, Inc.
- Current Assignee: APPLIED Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kacvinsky Daisak Bluni PLLC
- Main IPC: F16B39/22
- IPC: F16B39/22

Abstract:
A spring-loaded fastening system for fastening a liner to a structure, including a spring-loaded fastener with a cleat defining an interior cavity, a spring element disposed on a floor of the interior cavity, and a shoulder bolt with head portion disposed on the spring element, with a shoulder portion of the shoulder bolt extending through a mounting aperture in a floor of the interior cavity and a threaded portion of the shoulder bolt fastened to the structure. The system further includes a hanger pocket in a rear surface of the liner including a first portion with an opening large enough to accommodate a diameter of a lower portion of the cleat and not large enough to accommodate a diameter of an upper portion of the cleat, and a second portion adjoining the first portion with an opening large enough to accommodate the diameter of the upper portion of the cleat.
Public/Granted literature
- US20210123470A1 SPRING-LOADED FASTENING SYSTEM FOR PROCESS CHAMBER LINERS Public/Granted day:2021-04-29
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