Invention Grant
- Patent Title: Imaging devices having piezoelectric transceivers
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Application No.: US17180308Application Date: 2021-02-19
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Publication No.: US11313717B2Publication Date: 2022-04-26
- Inventor: Sandeep Akkaraju , Haesung Kwon , Brian Bircumshaw
- Applicant: eXo Imaging, Inc.
- Applicant Address: US CA Redwood City
- Assignee: eXo Imaging, Inc.
- Current Assignee: eXo Imaging, Inc.
- Current Assignee Address: US CA Redwood City
- Agency: Wilson Sonsini Goodrich & Rosati
- Main IPC: G01H11/00
- IPC: G01H11/00 ; H01L41/00 ; G01H11/08 ; G01S15/02 ; G01N29/07 ; H01G5/00 ; H01L41/113 ; H01L41/18 ; B81B3/00

Abstract:
A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.
Public/Granted literature
- US20210172788A1 IMAGING DEVICES HAVING PIEZOELECTRIC TRANSCEIVERS Public/Granted day:2021-06-10
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