Invention Grant
- Patent Title: Differential interference-based optical film defect detection method
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Application No.: US16326568Application Date: 2017-05-27
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Publication No.: US11313805B2Publication Date: 2022-04-26
- Inventor: Feng Lei , Xintian Bian
- Applicant: HUAIYIN NORMAL UNIVERSITY
- Applicant Address: CN Huaian
- Assignee: HUAIYIN NORMAL UNIVERSITY
- Current Assignee: HUAIYIN NORMAL UNIVERSITY
- Current Assignee Address: CN Huaian
- Agency: Houtteman Law LLC
- Priority: CN201610905495.1 20161018
- International Application: PCT/CN2017/086323 WO 20170527
- International Announcement: WO2018/072447 WO 20180426
- Main IPC: G01N21/88
- IPC: G01N21/88

Abstract:
A method for detecting optical film defects based on differential interference, comprising: an incident light is adjusted into a planar light wave, and the surface of an optical film to be detected is adjusted to be perpendicular to the planar light wave; the planar light wave sequentially passes through a diaphragm, the optical film, a first collimating lens and a lenticular lens, and then form two parallel outgoing beams by differential interference; the two parallel outgoing beams pass through a second collimating lens to form a differential interference image on a photodetector; and the differential interference image is analyzed to detect both superficial and internal defects of the optical film.
Public/Granted literature
- US20210285891A1 Differential Interference-Based Optical Film Defect Detection Method Public/Granted day:2021-09-16
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