Invention Grant
- Patent Title: Sensor devices for detecting a pH change in a solution
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Application No.: US16455772Application Date: 2019-06-28
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Publication No.: US11313827B2Publication Date: 2022-04-26
- Inventor: Lanxiang Wang , Bin Liu , Eng Huat Toh , Shyue Seng Tan , Kiok Boone Elgin Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Viering Jentschura & Partner MBB
- Main IPC: G01N27/41
- IPC: G01N27/41 ; G01N27/414 ; H01L29/16 ; H01L29/04

Abstract:
According to various embodiments, there is provided a sensor device that includes: a substrate and two semiconductor structures. Each semiconductor structure includes a source region and a drain region at least partially disposed within the substrate, a channel region between the source region and the drain region, and a gate region. A first semiconductor structure of the two semiconductor structures further includes a sensing element electrically connected to the first gate structure. The sensing element is configured to receive a solution. The drain regions of the two semiconductor structures are electrically coupled. The source regions of the two semiconductor structures are also electrically coupled. A mobility of charge carriers of the channel region of a second semiconductor structure of the two semiconductor structures is lower than a mobility of charge carriers of the channel region of the first semiconductor structure.
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