Invention Grant
- Patent Title: Reticle pod having positioning member
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Application No.: US17023409Application Date: 2020-09-17
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Publication No.: US11314175B2Publication Date: 2022-04-26
- Inventor: Chia-Ho Chuang , Hsing-Min Wen , Yi-Hsuan Lee , Hsin-Min Hsueh , Ming-Chien Chiu
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Applicant Address: TW New Taipei
- Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee Address: TW New Taipei
- Priority: TW109124946 20200723
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/673 ; H01L21/677

Abstract:
A reticle pod having a positioning member includes a base, a lid and a plurality of positioning members. The lid shuts relative to the base to form a substantially cuboid case. The case has a storing space for receiving a reticle. The positioning members are arranged in a shutting direction and disposed on at least two edges of the lid or at least two edges of the base, respectively. The positioning members each include a connecting portion, a correcting portion and a guiding slope portion. The connecting portion connects the edges of the lid. The correcting portion has one end connected to the connecting portion and extending in a shutting direction and an opposing end connected to the guiding slope portion. The guiding slope portion has a slope extending outward. The reticle pod having a positioning member is error-free, allowing the lid to shut precisely relative to the base.
Public/Granted literature
- US20220026818A1 RETICLE POD HAVING POSITIONING MEMBER Public/Granted day:2022-01-27
Information query
IPC分类: