Invention Grant
- Patent Title: Supporting an optical element
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Application No.: US17181548Application Date: 2021-02-22
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Publication No.: US11314177B2Publication Date: 2022-04-26
- Inventor: Jens Kugler , Bernhard Geuppert , Alexander Kharitonov
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102018216344.8 20180925
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G01B11/00 ; G02B7/02

Abstract:
An optical arrangement for use in an optical imaging device includes an optical element unit and a detection device and/or an actuating device. The optical element unit includes at least one optical element. The detection device determines in a plurality of M degrees of freedom in each case a detection value which is representative of a relative position or orientation of an element reference of the optical element in relation to a primary reference of the detection device in the respective degree of freedom. The detection device includes a plurality of N detection units, each of which outputs a detection signal which is representative of a distance and/or a displacement of the detection unit in relation to a secondary reference assigned to the optical element and the respective detection unit.
Public/Granted literature
- US20210181644A1 SUPPORTING AN OPTICAL ELEMENT Public/Granted day:2021-06-17
Information query
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