Invention Grant
- Patent Title: Top electrode interconnect structures
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Application No.: US16197646Application Date: 2018-11-21
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Publication No.: US11315870B2Publication Date: 2022-04-26
- Inventor: Il Goo Kim , Roderick A. Augur
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L27/24 ; H01L27/22

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to top electrode interconnect structures and methods of manufacture. The structure includes: a lower metallization feature; an upper metallization feature; a bottom electrode in direct contact with the lower metallization feature; one or more switching materials over the bottom electrode; a top electrode over the one or more switching materials; and a self-aligned via interconnection in contact with the top electrode and the upper metallization feature.
Public/Granted literature
- US20200161236A1 TOP ELECTRODE INTERCONNECT STRUCTURES Public/Granted day:2020-05-21
Information query
IPC分类: