Invention Grant
- Patent Title: Semiconductor device with composite connection structure and method for fabricating the same
-
Application No.: US16829698Application Date: 2020-03-25
-
Publication No.: US11315893B2Publication Date: 2022-04-26
- Inventor: Tse-Yao Huang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/528 ; H01L23/522 ; H01L25/065 ; H01L25/00

Abstract:
The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first insulating layer positioned above the substrate, a second insulating layer positioned above the first insulating layer, a plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and an alleviation structure positioned between the first insulating layer and the second insulating layer. The alleviation structure includes a first connecting interlayer respectively electrically coupled to the plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and a plurality of alleviation structures positioned between the plurality of first conductive features in the first insulating layer and the plurality of first conductive features in the second insulating layer, wherein a porosity of the plurality of alleviation structures is between about 25% and about 100%.
Public/Granted literature
- US20210305182A1 SEMICONDUCTOR DEVICE WITH COMPOSITE CONNECTION STRUCTURE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-09-30
Information query
IPC分类: