Invention Grant
- Patent Title: 1.5-transistor (1.5T) one time programmable (OTP) memory with thin gate to drain dielectric and methods thereof
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Application No.: US16997168Application Date: 2020-08-19
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Publication No.: US11315937B2Publication Date: 2022-04-26
- Inventor: Geeng-Chuan Chern
- Applicant: HeFeChip Corporation Limited
- Applicant Address: HK Hong Kong
- Assignee: HeFeChip Corporation Limited
- Current Assignee: HeFeChip Corporation Limited
- Current Assignee Address: HK Hong Kong
- Agency: Allen, Dyer, Doppelt + Gilchrist, PA
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L27/112 ; H01L29/423 ; H01L29/40 ; G11C17/18 ; G11C17/16

Abstract:
A semiconductor device and methods thereof are disclosed. The proposed semiconductor device includes at least a unit cell wherein the unit cell includes a select transistor, and half of a ground-gate transistor electrically connected to the select transistor, and including a central conductive gate electrode region, two side conductive spacer regions and a gate dielectric layer, wherein a first and a second thicknesses of the gate dielectric layer underneath the two side conductive spacer regions are thinner than a third thickness of the gate dielectric layer underneath the central conductive gate electrode region.
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