Invention Grant
- Patent Title: Photodiode and/or PIN diode structures
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Application No.: US16887375Application Date: 2020-05-29
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Publication No.: US11316064B2Publication Date: 2022-04-26
- Inventor: Siva P. Adusumilli , John J. Ellis-Monaghan , Mark D. Levy , Vibhor Jain , Andre Sturm
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L31/105 ; H01L31/036 ; H01L31/028 ; H01L31/0312

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: at least one fin including substrate material, the at least one fin including sidewalls and a top surface; a trench on opposing sides of the at least one fin; a first semiconductor material lining the sidewalls and the top surface of the at least one fin, and a bottom surface of the trench; a photosensitive semiconductor material on the first semiconductor material and at least partially filling the trench; and a third semiconductor material on the photosensitive semiconductor material.
Public/Granted literature
- US20210376180A1 PHOTODIODE AND/OR PIN DIODE STRUCTURES Public/Granted day:2021-12-02
Information query
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