Invention Grant
- Patent Title: Multi-wafer based light absorption apparatus and applications thereof
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Application No.: US16676310Application Date: 2019-11-06
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Publication No.: US11316065B2Publication Date: 2022-04-26
- Inventor: Szu-Lin Cheng , Han-Din Liu , Shu-Lu Chen , Yun-Chung Na , Hui-Wen Chen
- Applicant: Artilux, Inc.
- Applicant Address: US CA Menlo Park
- Assignee: Artilux, Inc.
- Current Assignee: Artilux, Inc.
- Current Assignee Address: US CA Menlo Park
- Agency: Perkins Coie LLP
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L27/146 ; H01L31/0232 ; H01L31/02 ; H01L31/0216 ; H01L31/107 ; H01L31/054 ; H01L31/105 ; H01L31/028

Abstract:
Structures and techniques introduced here enable the design and fabrication of photodetectors (PDs) and/or other electronic circuits using typical semiconductor device manufacturing technologies meanwhile reducing the adverse impacts on PDs' performance. Examples of the various structures and techniques introduced here include, but not limited to, a pre-PD homogeneous wafer bonding technique, a pre-PD heterogeneous wafer bonding technique, a post-PD wafer bonding technique, their combinations, and a number of mirror equipped PD structures. With the introduced structures and techniques, it is possible to implement PDs using typical direct growth material epitaxy technology while reducing the adverse impact of the defect layer at the material interface caused by lattice mismatch.
Public/Granted literature
- US20200075793A1 MULTI-WAFER BASED LIGHT ABSORPTION APPARATUS AND APPLICATIONS THEREOF Public/Granted day:2020-03-05
Information query
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