Invention Grant
- Patent Title: Cleaning method
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Application No.: US17170337Application Date: 2021-02-08
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Publication No.: US11318503B2Publication Date: 2022-05-03
- Inventor: Hiroki Haremaki
- Applicant: SUGINO MACHINE LIMITED
- Applicant Address: JP Uozu
- Assignee: SUGINO MACHINE LIMITED
- Current Assignee: SUGINO MACHINE LIMITED
- Current Assignee Address: JP Uozu
- Agency: United IP Counselors, LLC
- Priority: JPJP2020-077361 20200424
- Main IPC: B08B3/02
- IPC: B08B3/02 ; B08B5/02

Abstract:
A cleaning method of sufficiently cleaning a workpiece is provided. The cleaning method, including: rotating or swinging a workpiece having a first cleaning surface about a table rotation axis; ejecting cleaning fluid from a nozzle along an ejection axis; and swinging the nozzle about a nozzle rotation axis parallel to the table rotation axis to keep a constant impact angle formed between the ejection axis and the first cleaning surface for cleaning the workpiece.
Public/Granted literature
- US20210331213A1 CLEANING METHOD Public/Granted day:2021-10-28
Information query
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