Flotation conveyance apparatus and laser processing apparatus
Abstract:
A flotation conveyance apparatus according to an embodiment includes a flotation unit for floating a substrate by ejecting a gas to a lower surface of the substrate. The flotation unit includes a plurality of ejecting ports provided on a surface facing the substrate and configured to eject the gas, and slits penetrating the flotation unit in a vertical direction. The flotation conveyance apparatus is configured in such a way that the gas staying between a surface of the flotation unit facing the substrate and the substrate is discharged to a lower surface side of the flotation unit through the slits.
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