Invention Grant
- Patent Title: Flotation conveyance apparatus and laser processing apparatus
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Application No.: US17172775Application Date: 2021-02-10
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Publication No.: US11319167B2Publication Date: 2022-05-03
- Inventor: Takahiro Fuji , Yoshihiro Yamaguchi
- Applicant: THE JAPAN STEEL WORKS, LTD.
- Applicant Address: JP Tokyo
- Assignee: THE JAPAN STEEL WORKS, LTD.
- Current Assignee: THE JAPAN STEEL WORKS, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2020-030105 20200226
- Main IPC: B65G51/03
- IPC: B65G51/03 ; B65G49/06

Abstract:
A flotation conveyance apparatus according to an embodiment includes a flotation unit for floating a substrate by ejecting a gas to a lower surface of the substrate. The flotation unit includes a plurality of ejecting ports provided on a surface facing the substrate and configured to eject the gas, and slits penetrating the flotation unit in a vertical direction. The flotation conveyance apparatus is configured in such a way that the gas staying between a surface of the flotation unit facing the substrate and the substrate is discharged to a lower surface side of the flotation unit through the slits.
Public/Granted literature
- US20210261358A1 FLOTATION CONVEYANCE APPARATUS AND LASER PROCESSING APPARATUS Public/Granted day:2021-08-26
Information query
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