Invention Grant
- Patent Title: Waste liquid treating apparatus
-
Application No.: US16931674Application Date: 2020-07-17
-
Publication No.: US11319214B2Publication Date: 2022-05-03
- Inventor: Tadaomi Matsumoto , Masaru Saito
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JPJP2019-137923 20190726
- Main IPC: C02F1/00
- IPC: C02F1/00 ; B01D21/00 ; B01D21/34 ; B01D21/24 ; C02F103/34

Abstract:
A waste liquid treating apparatus includes a waste liquid accommodating unit for waste water discharged from a processing apparatus. A waste liquid filter unit filters the waste liquid in that tank to purify the waste liquid into fresh water. A fresh water reservoir tank reserves the fresh water obtained by filtering the waste liquid by the waste liquid filter unit. A pure water producing unit purifies the fresh water reserved in the fresh water reservoir tank into pure water, and a temperature control unit controls the pure water obtained by purifying the fresh water by the pure water purifying unit to a predetermined temperature. A bubble water seal type pump sucks at least bubbles generated in the waste liquid filter unit, and a sealing water reservoir tank reserves the bubbles sucked by the bubble water seal type pump as a waste liquid.
Public/Granted literature
- US20210024373A1 WASTE LIQUID TREATING APPARATUS Public/Granted day:2021-01-28
Information query