Invention Grant
- Patent Title: Frequency-modulating sensor array
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Application No.: US15702717Application Date: 2017-09-12
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Publication No.: US11320329B2Publication Date: 2022-05-03
- Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
- Applicant: SiTime Corporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01N1/14
- IPC: G01N1/14 ; G01L1/20 ; G01L5/16 ; G01L1/14 ; G01L9/00

Abstract:
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of a sensed property, such as regional contact forces, ambient conditions and/or environmental composition. The resonant MEMS sensors generate signals that oscillate at respective frequencies corresponding to the sensed property, increasing or decreasing in frequency in response to an increase or decrease in that property to effect a frequency-modulated digital output.
Public/Granted literature
- US20180087984A1 FREQUENCY-MODULATING SENSOR ARRAY Public/Granted day:2018-03-29
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