Invention Grant
- Patent Title: Composition for resist underlayer film formation, resist underlayer film and method for producing patterned substrate
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Application No.: US16100501Application Date: 2018-08-10
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Publication No.: US11320739B2Publication Date: 2022-05-03
- Inventor: Goji Wakamatsu , Naoya Nosaka , Tsubasa Abe , Kazunori Sakai , Yuushi Matsumura , Hayato Namai
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2016-026408 20160215
- Main IPC: G03F7/40
- IPC: G03F7/40 ; G03F7/30 ; G03F7/09 ; G03F7/11 ; H01L21/027 ; G03F7/26 ; G03F7/039

Abstract:
A composition for resist underlayer film formation, includes a first compound and a solvent. The first compound includes a first group represented by formula (1) and a partial structure comprising an aromatic ring. In the formula (1), R1 represents a single bond or an oxygen atom, R2 represents a divalent chain or alicyclic hydrocarbon group having 1 to 30 carbon atoms, and * denotes a bonding site to a moiety other than the first group of the first compound. *—R1—R2—CN (1)
Public/Granted literature
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