Invention Grant
- Patent Title: Actuator device for aligning an element, projection exposure apparatus for semiconductor lithography, and method for aligning an element
-
Application No.: US17220305Application Date: 2021-04-01
-
Publication No.: US11320749B2Publication Date: 2022-05-03
- Inventor: Boaz Pnini
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102018216964.0 20181002
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An actuator device for aligning an element includes at least one first actuator unit, which is secured to a support structure, for a first setting range and a second actuator unit, which is able to be secured to the element, for a second setting range. The second actuator unit is connected to an output element of the first actuator unit so that the positioning of the second actuator unit is adjustable by an adjustment of the output element. The first actuator unit has an adjusting element and a fixing element, which is able to be secured to the support structure. The fixing element secures the output element in a force-locking manner in an operating state of the element. The fixing element is furthermore configured to release the force-locking connection in a setting state of the element to enable an adjustment of the output element via the adjusting element.
Public/Granted literature
Information query
IPC分类: