Invention Grant
- Patent Title: Supporting unit and substrate processing apparatus including the same
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Application No.: US16913039Application Date: 2020-06-26
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Publication No.: US11320752B2Publication Date: 2022-05-03
- Inventor: Jaeoh Bang
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2019-0076897 20190627
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/687 ; H01L21/67
Abstract:
A supporting unit is provided to support a substrate. The supporting unit includes a supporting plate including a pressure reducing fluid passage formed inside the supporting plate, and a flanger provided in a groove formed in a top surface of the supporting plate. A lower area of the flanger is connected to the pressure reducing fluid passage in the groove, and the flanger moves up and down by reduced pressure applied through the pressure reducing fluid passage.
Information query
IPC分类:
