Invention Grant
- Patent Title: Processing apparatus and chuck table
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Application No.: US16910501Application Date: 2020-06-24
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Publication No.: US11321550B2Publication Date: 2022-05-03
- Inventor: Satoshi Hanajima
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JPJP2019-122995 20190701
- Main IPC: G05B19/00
- IPC: G05B19/00 ; G06K7/14 ; G05B19/402 ; G06K7/10

Abstract:
A processing apparatus includes a chuck table, a processing unit configured to process a workpiece held on the chuck table, a height measuring unit fitted to the processing unit, the height measuring unit measuring, as height data, heights at a plurality of coordinates of the holding surface measured while a moving unit is moved, a reading unit capable of reading an information medium, and a control unit. The chuck table includes an information medium on which identifying information distinguishing the chuck table is recorded. The control unit includes a height data recording section configured to record the height data and the identifying information in association with each other, and a processing control section configured to control a height of the processing unit during processing on the basis of the height data associated with the identifying information read by the reading unit.
Public/Granted literature
- US20210004553A1 PROCESSING APPARATUS AND CHUCK TABLE Public/Granted day:2021-01-07
Information query
IPC分类: