Invention Grant
- Patent Title: System and method for precision formation of a lattice on a substrate
-
Application No.: US16702092Application Date: 2019-12-03
-
Publication No.: US11322356B2Publication Date: 2022-05-03
- Inventor: Denton Jarvis
- Applicant: Denton Jarvis
- Applicant Address: US UT Morgan
- Assignee: Denton Jarvis
- Current Assignee: Denton Jarvis
- Current Assignee Address: US UT Morgan
- Agency: Morriss O'Bryant Compagni Cannon, PLLC
- Main IPC: H01L21/223
- IPC: H01L21/223 ; H01L21/268 ; H01L29/16 ; H01L29/20 ; H01J37/32 ; H01L29/24
Abstract:
A system and method for manufacturing a lattice structure of ionized particles on a substrate, wherein the process may be improved by controlling the number of ionized particles that are ejected from an ionizer and directed to a substrate, and wherein the ionized particles are disposed on the substrate, thereby enabling the creation of a lattice structure that may be as thin as a single layer of ionized particles.
Information query
IPC分类:
