Invention Grant
- Patent Title: Ultrafast laser annealing of thin films
-
Application No.: US17158120Application Date: 2021-01-26
-
Publication No.: US11322366B1Publication Date: 2022-05-03
- Inventor: Marc Currie , Virginia D. Wheeler
- Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
- Applicant Address: US VA Arlington
- Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
- Current Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US VA Arlington
- Agency: US Naval Research Laboratory
- Agent Joslyn Barritt
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/477
Abstract:
A method for locally annealing and crystallizing a thin film by directing ultrashort optical pulses from an ultrafast laser into the film. The ultrashort pulses can selectively produce an annealed pattern and/or activate dopants on the surface or within the film.
Information query
IPC分类:
