Invention Grant
- Patent Title: Optical station for exchanging optical elements
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Application No.: US15248282Application Date: 2016-08-26
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Publication No.: US11322374B2Publication Date: 2022-05-03
- Inventor: Job Vianen , Ralf Petrus Francis Noijen , Gerrit Arie Van Ooik , Marius Van Der Does
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Priority: EP15002577 20150902
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B23K26/064 ; B23K26/364 ; G02B7/16 ; B23K101/40 ; B23K103/00

Abstract:
An optical station for a laser processing device including a plurality of holders for holding respective optical elements; a rotatable magazine having a plurality of accommodation spaces for accommodating the plurality of holders; a positioning device having a holder clamp for clamping and positioning a selected one of the optical elements. a magazine actuator for rotating the magazine; linear shifting means for shifting the magazine in a direction parallel to the optical axis, wherein the magazine is shifted towards the positioning device such that the positioning device lifts the holder from its accommodation space.
Public/Granted literature
- US20170062247A1 OPTICAL STATION FOR EXCHANGING OPTICAL ELEMENTS Public/Granted day:2017-03-02
Information query
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