Invention Grant
- Patent Title: Peeling apparatus
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Application No.: US16739423Application Date: 2020-01-10
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Publication No.: US11322376B2Publication Date: 2022-05-03
- Inventor: Fumiaki Ito
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2019-004269 20190115
- Main IPC: B32B43/00
- IPC: B32B43/00 ; H01L21/67 ; H01L21/683

Abstract:
A peeling apparatus includes a holding table for holding a plate-shaped workpiece having an upper surface and a lower surface, the upper surface being covered with a protective member. The lower surface of the workpiece is held on the holding table. A peeling mechanism peels off the protective member from the workpiece, and a recovery box is set in the peeling apparatus for recovering the protective member. The recovery box has an upper opening from which the protective member is put into the recovery box. The peeling apparatus further includes a removing mechanism for allowing the protective member to be put into the recovery box from the upper opening, and also allowing the protective member recovered into the recovery box to be removed from the recovery box, while operating the peeling mechanism to peel off the protective member.
Public/Granted literature
- US20200227292A1 PEELING APPARATUS Public/Granted day:2020-07-16
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