Invention Grant
- Patent Title: Substrate processing apparatus and substrate processing method
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Application No.: US17034173Application Date: 2020-09-28
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Publication No.: US11322384B2Publication Date: 2022-05-03
- Inventor: Shunya Kubota , Emi Matsui , Katsuhiro Yamazaki , Yoshikazu Ohtani , Kyouhei Tomioka
- Applicant: SHIN-ETSU ENGINEERING CO., LTD. , SHIBAURA MECHATRONICS CORPORATION
- Applicant Address: JP Tokyo; JP Yokohama
- Assignee: SHIN-ETSU ENGINEERING CO., LTD.,SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIN-ETSU ENGINEERING CO., LTD.,SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Tokyo; JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-180844 20190930
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683

Abstract:
According to one embodiment, a substrate processing apparatus and a substrate processing method that can improve the quality of substrates are provided. The substrate processing apparatus according to one embodiment includes: a table 20 configured to support a processing target W including a substrate W1, a ring W2 surrounding a surrounding of the substrate W1, and a dicing tape W3 adhered to a lower surface of the substrate W1 and a lower surface of the ring W2, and a liquid supplier 50 configured to eject a liquid which does not mix with a processing liquid for processing the substrate W1 and which has a specific gravity heavier than the processing liquid to one of an upper surface of the ring W2 of the processing target W supported by the table 20 rotating by the rotation mechanism 30, an outer circumference end portion of the substrate W1 of the processing target W supported by the table 20 rotating by the rotation mechanism 30, and between the substrate W1 and the ring W2 of the processing target W supported by the table 20 rotating by the rotation mechanism in accordance with a rotation number of the table 20 to supply the liquid between the substrate W1 and the ring W2 of the processing target W.
Public/Granted literature
- US20210098279A1 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Public/Granted day:2021-04-01
Information query
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