Invention Grant
- Patent Title: Dielectric capping structure overlying a conductive structure to increase stability
-
Application No.: US16876432Application Date: 2020-05-18
-
Publication No.: US11322395B2Publication Date: 2022-05-03
- Inventor: Hsin-Yen Huang , Chi-Lin Teng , Hai-Ching Chen , Shau-Lin Shue , Shao-Kuan Lee , Cheng-Chin Lee , Ting-Ya Lo
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschwelier & Potashnik, LLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532 ; H01L23/528

Abstract:
Some embodiments relate to a semiconductor structure including a first inter-level dielectric (ILD) structure overlying a substrate. A conductive contact directly overlies the substrate and is disposed within the first ILD structure. A conductive wire directly overlies the conductive contact. A conductive capping layer overlies the conductive wire such that the conductive capping layer continuously extends along an upper surface of the conductive wire. A second ILD structure overlies the conductive capping layer. The second ILD structure is disposed along opposing sides of the conductive wire. A pair of air-gaps are disposed within the second ILD structure. The conductive wire is spaced laterally between the pair of air-gaps. A dielectric capping layer is disposed along an upper surface of the conductive capping layer. The dielectric capping layer is spaced laterally between the pair of air-gaps and is laterally offset from an upper surface of the first ILD structure.
Public/Granted literature
- US20210193505A1 DIELECTRIC CAPPING STRUCTURE OVERLYING A CONDUCTIVE STRUCTURE TO INCREASE STABILITY Public/Granted day:2021-06-24
Information query
IPC分类: