Invention Grant
- Patent Title: Three-dimensional memory device with dielectric wall support structures and method of forming the same
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Application No.: US17039160Application Date: 2020-09-30
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Publication No.: US11322440B2Publication Date: 2022-05-03
- Inventor: Tomohiro Kubo
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L27/11556 ; H01L21/768 ; H01L23/522 ; H01L27/11582

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located between line trenches, a first memory array region and a second memory array region, and a pair of dielectric wall structures located between the first line trench and the second line trench and between the memory array regions. Each layer within the alternating stack continuously extends between the first memory array region and the second memory array region in a connection region. The electrically conductive layers of the alternating stack have lateral extents that decrease with a distance from the substrate in a staircase region. Dielectric material plates interlaced with insulating plates or insulating layers are provided between the dielectric wall structures.
Public/Granted literature
- US20220102273A1 THREE-DIMENSIONAL MEMORY DEVICE WITH DIELECTRIC WALL SUPPORT STRUCTURES AND METHOD OF FORMING THE SAME Public/Granted day:2022-03-31
Information query
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