Semiconductor storage device including a memory cell array and manufacturing method of the same
Abstract:
A semiconductor storage device according to an embodiment includes: an array chip having a memory cell array; a circuit chip having a circuit electrically connected to a memory cell; and a metal pad bonding the array chip and the circuit chip together. The metal pad includes an impurity. A concentration of the impurity is lowered as separating in a depth direction apart from a surface in a thickness direction of the metal pad.
Public/Granted literature
Information query
Patent Agency Ranking
0/0