Invention Grant
- Patent Title: Three-dimensional memory device including a silicon-germanium source contact layer and method of making the same
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Application No.: US17001270Application Date: 2020-08-24
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Publication No.: US11322509B2Publication Date: 2022-05-03
- Inventor: Ashish Baraskar , Raghuveer S. Makala , Peter Rabkin
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11524 ; H01L21/8239 ; H01L27/11582 ; H01L27/1157 ; H01L21/8234 ; H01L29/08 ; H01L29/10

Abstract:
A memory device includes a silicon-germanium source contact layer, an alternating stack of insulating layers and electrically conductive layers located over the silicon-germanium source contact layer, and a memory stack structure vertically extending through the alternating stack. The memory stack structure comprises a memory film and a vertical semiconductor channel that contacts the memory film. The silicon-germanium source contact layer contacts a cylindrical portion of an outer sidewall of the vertical semiconductor channel. Logic circuits for operating the memory elements may be provided on a substrate within a same semiconductor die, or may be provided in another semiconductor die that is bonded to the semiconductor die containing the memory device.
Information query
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