Invention Grant
- Patent Title: Semiconductor storage device and manufacturing method thereof
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Application No.: US16806540Application Date: 2020-03-02
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Publication No.: US11322514B2Publication Date: 2022-05-03
- Inventor: Hiroshi Nakaki
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JPJP2019-113443 20190619
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/528 ; H01L27/1157 ; H01L27/11524 ; H01L27/11556 ; G11C16/04 ; H01L27/11519 ; H01L27/11565

Abstract:
According to one embodiment, storage device comprises first wiring layers stacked along a first direction and a memory pillar extending through the first wiring layers. The memory pillar includes a first semiconductor layer. A second wiring layer is above an upper end of the memory pillar. A second semiconductor layer has a first portion between the first semiconductor layer and the second wiring layer and a second portion extending away from the first semiconductor layer. A first insulating layer is between the first portion and the second wiring layer in first direction, and also between the second portion and the second wiring layer in a second direction intersecting the first direction.
Information query
IPC分类: