• Patent Title: Backside illuminated image sensor
  • Application No.: US16616581
    Application Date: 2018-05-07
  • Publication No.: US11322532B2
    Publication Date: 2022-05-03
  • Inventor: Guy Meynants
  • Applicant: ams AG
  • Applicant Address: AT Premstaetten
  • Assignee: ams AG
  • Current Assignee: ams AG
  • Current Assignee Address: AT Premstaetten
  • Agency: MH2 Technology Law Group LLP
  • Priority: EP17173499 20170530
  • International Application: PCT/EP2018/061711 WO 20180507
  • International Announcement: WO2018/219592 WO 20181206
  • Main IPC: H01L27/146
  • IPC: H01L27/146 H01L49/02
Backside illuminated image sensor
Abstract:
The backside illuminated image sensor comprises a substrate of semiconductor material, detector elements arranged at a main surface, a dielectric layer on or above the main surface, a first capacitor layer and a second capacitor layer above the main surface, the capacitor layers forming a capacitor (C1, C2). A peripheral circuit is integrated in the substrate apart from the detector elements, the peripheral circuit being configured for one or more operations of the group consisting of voltage regulation, charge pump operation and stabilization of clock generation, and the capacitor layers are electrically connected with contact regions of the peripheral circuit.
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