Invention Grant
- Patent Title: Pad structure for front side illuminated image sensor
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Application No.: US17070430Application Date: 2020-10-14
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Publication No.: US11322540B2Publication Date: 2022-05-03
- Inventor: Kai-Chun Hsu , Ching-Chun Wang , Dun-Nian Yaung , Jeng-Shyan Lin , Shyh-Fann Ting
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L23/00

Abstract:
The present disclosure relates to an integrated circuit. The integrated circuit includes a plurality of interconnects within a dielectric structure over a substrate. A passivation structure is arranged over the dielectric structure. The passivation structure has sidewalls connected to one or more upper surfaces of the passivation structure. A bond pad is arranged directly between the sidewalls of the passivation structure. An upper passivation layer is disposed over the passivation structure and the bond pad. The upper passivation layer extends from over an upper surface of the bond pad to within a recess in the upper surface of the bond pad.
Public/Granted literature
- US20210028219A1 PAD STRUCTURE FOR FRONT SIDE ILLUMINATED IMAGE SENSOR Public/Granted day:2021-01-28
Information query
IPC分类: