Invention Grant
- Patent Title: Method for MRAM top electrode connection
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Application No.: US16884353Application Date: 2020-05-27
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Publication No.: US11322543B2Publication Date: 2022-05-03
- Inventor: Harry-Hak-Lay Chuang , Hung Cho Wang , Sheng-Chang Chen , Sheng-Huang Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/02 ; H01L43/12

Abstract:
Various embodiments of the present disclosure are directed towards a memory device including a protective sidewall spacer layer that laterally encloses a memory cell. An upper inter-level dielectric (ILD) layer overlying a substrate. The memory cell is disposed with the upper ILD layer. The memory cell includes a top electrode, a bottom electrode, and a magnetic tunnel junction (MTJ) structure disposed between the top and bottom electrodes. A sidewall spacer structure laterally surrounds the memory cell. The sidewall spacer structure includes a first sidewall spacer layer, a second sidewall spacer layer, and the protective sidewall spacer layer. The first and second sidewall spacer layers comprise a first material and the protective sidewall spacer layer comprises a second material different from the first material. A conductive wire overlying the first memory cell. The conductive wire contacts the top electrode and the protective sidewall spacer layer.
Public/Granted literature
- US20210375987A1 METHOD FOR MRAM TOP ELECTRODE CONNECTION Public/Granted day:2021-12-02
Information query
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