Invention Grant
- Patent Title: Inductive device
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Application No.: US16947359Application Date: 2020-07-29
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Publication No.: US11322576B2Publication Date: 2022-05-03
- Inventor: Wei-Yu Chou , Yang-Che Chen , Chen-Hua Lin , Victor Chiang Liang , Huang-Wen Tseng , Chwen-Ming Liu
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: Harrity & Harrity, LLP
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01F41/34 ; H01L27/08 ; H01L23/522

Abstract:
An inductive device includes an insulating layer, a lower magnetic layer, and an upper magnetic layer that are formed such that the insulating layer does not separate the lower magnetic layer and the upper magnetic layer at the outer edges or wings of the inductive device. The lower magnetic layer and the upper magnetic layer form a continuous magnetic layer around the insulating layer and the conductors of the inductive device. Magnetic leakage paths are provided by forming openings through the upper magnetic layer. The openings may be formed through the upper magnetic layer by semiconductor processes that have relatively higher precision and accuracy compared to semiconductor processes for forming the insulating layer such as spin coating. This reduces magnetic leakage path variation within the inductive device and from inductive device to inductive device.
Public/Granted literature
- US20220037458A1 INDUCTIVE DEVICE Public/Granted day:2022-02-03
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