Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
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Application No.: US16928282Application Date: 2020-07-14
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Publication No.: US11322604B2Publication Date: 2022-05-03
- Inventor: Shinya Soneda , Ryu Kamibaba , Tetsuya Nitta
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JPJP2019-173680 20190925
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L29/74 ; H01L29/66

Abstract:
An object is to provide a technique capable of improving both recovery loss and recovery capability. The semiconductor device includes a base layer of a second conductive type disposed on a front surface side of the semiconductor substrate in the IGBT region and an anode layer of a second conductive type disposed on a front surface side of the semiconductor substrate in the diode region. The anode layer includes a first portion having a lower end located at a same position as a lower end of the base layer or having a lower end located above the lower end of the base layer and a second portion adjacent to the first portion in plan view, and whose lower end is located above the lower end of the first portion.
Public/Granted literature
- US20210091216A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-03-25
Information query
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