Invention Grant
- Patent Title: High-volume millimeter scale manufacturing
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Application No.: US16279966Application Date: 2019-02-19
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Publication No.: US11325828B2Publication Date: 2022-05-10
- Inventor: Pratheev S. Sreetharan , Andrew Baisch , Alina Visco , Michael Karpelson
- Applicant: VIBRANT COMPOSITES, INC.
- Applicant Address: US MA Boston
- Assignee: VIBRANT COMPOSITES, INC.
- Current Assignee: VIBRANT COMPOSITES, INC.
- Current Assignee Address: US MA Boston
- Agency: Bergman LLC
- Agent Michael Bergman
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B06B1/04 ; B06B1/10

Abstract:
A method for manufacturing a millimeter scale electromechanical device includes coupling a stainless steel ply to a polymer carrier ply, coating the stainless steel ply in a photo resist material, masking the photoresist material, exposing the photoresist material to cure a portion of the photoresist material, developing the photoresist material to remove uncured photoresist material from the stainless steel ply, chemically etching the stainless steel ply to remove a patterned portion of the stainless steel ply, dissolving the polymer carrier ply to release unwanted chips of the stainless steel ply, and adhering the patterned stainless steel ply to a flexible material ply to form a sub-laminate.
Public/Granted literature
- US20190256353A1 HIGH-VOLUME MILLIMETER SCALE MANUFACTURING Public/Granted day:2019-08-22
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