Invention Grant
- Patent Title: Composition for surface treatment
-
Application No.: US16330034Application Date: 2017-08-09
-
Publication No.: US11326049B2Publication Date: 2022-05-10
- Inventor: Jingzhi Chen
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Katten Muchin Rosenman LLP
- Priority: JPJP2016-184768 20160921
- International Application: PCT/JP2017/029003 WO 20170809
- International Announcement: WO2018/055941 WO 20180329
- Main IPC: C11D3/37
- IPC: C11D3/37 ; C11D7/26 ; C11D7/32 ; C08L29/04 ; H01L21/02 ; C08G61/04 ; C08L33/02 ; C08L33/24 ; C11D11/00 ; C11D7/22 ; H01L21/304 ; C11D3/30 ; C11D7/34

Abstract:
To provide a composition for surface treatment capable of treating a surface of a polished object to be polished having both of a silicon-silicon bond and a nitrogen-silicon bond by sufficiently removing defects on the surface of the polished object to be polished. The composition for surface treatment contains a nonionic water-soluble polymer (A) having a main chain including only a carbon atom or a main chain consisting of a carbon atom and a nitrogen atom, and an anionic water-soluble polymer (B) having a main chain including only a carbon atom and a side chain having a sulfonic acid group or a group having a salt thereof or a carboxyl group or a group having a salt thereof, and being bonded to the main chain including only a carbon atom, and the composition is used for surface treatment of a polished object to be polished containing a silicon-silicon bond and a nitrogen-silicon bond and a pH of the composition is less than 9.0.
Public/Granted literature
- US20190203027A1 COMPOSITION FOR SURFACE TREATMENT Public/Granted day:2019-07-04
Information query