- Patent Title: Masks for fabrication of organic lighting-emitting diode devices
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Application No.: US16424493Application Date: 2019-05-29
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Publication No.: US11326245B2Publication Date: 2022-05-10
- Inventor: Mengfan Wang , Guobing Wang , Qian Su , Jinku Li , Menghua Kang , Xin Ye
- Applicant: Kunshan Go-Visionox Opto-Electronics Co., Ltd.
- Applicant Address: CN Kunshan
- Assignee: Kunshan Go-Visionox Opto-Electronics Co., Ltd.
- Current Assignee: Kunshan Go-Visionox Opto-Electronics Co., Ltd.
- Current Assignee Address: CN Kunshan
- Agency: Kilpatrick Townsend & Stockton
- Priority: CN201820714454.9 20180514
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/56 ; H01L51/00

Abstract:
A mask includes a mask body and at least one sub-mask provided on the mask body. The sub-mask includes an evaporation zone and a shield portion. The shield portion is provided with at least one groove in a thickness direction of the sub-mask. The groove has a depth smaller than a thickness of the mask body. Since the shield portion is provided with the groove, and a single groove has a depth smaller than the thickness of the mask body, it not only ensures that there is no pixel evaporated onto a substrate at the shield portion, but also reduces the thickness of the shield portion, thereby reduces weight thereof, lowers the weight difference between the shield portion and the evaporation zone and reduces the stress concentration on the shield portion, resulting in that the mask body is evenly stressed during tensioning.
Public/Granted literature
- US20190276927A1 MASKS FOR FABRICATION OF ORGANIC LIGHTING-EMITTING DIODE DEVICES Public/Granted day:2019-09-12
Information query
IPC分类: